Lithius dual
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Lithius dual
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WebWhile I was on this team, I was to modify Intel's 1265, and 1266 process tools to the desired process of 1268 on Act 12s, Act 12 SLM, and Lithius (dual / single block) Clean Tracks. … WebCLEAN TRACK™ LITHIUS Pro™ Z is TEL's most advanced 300mm coater/developer for the 10nm technology node and beyond. It incorporates user-friendly operation, flexible …
Web1. A method of forming a damascene structure on a substrate, comprising: preparing a film stack on said substrate, said film stack comprising a SiCOH-containing layer formed on said substrate, a silicon oxide (SiO x) layer formed on said SiCOH-containing layer, and a first mask layer formed on said silicon oxide layer; forming a trench pattern in said first mask …
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